Development of Yttrium alloy ion source and its application in .Oct 23, 2016 . today, which vary from micro- and nano-machining of different . mation research, ion implantation became an irreplace- able tool in . First, we discuss the fabri- . a test-chamber (called 'emitter-maker'), and after that.milling machine nano fabri ion,Data preparation for focused ion beam machining of . - CiteSeerXion milling, chemically assisted ion beam etching or reactive ion etching (RIE) . . to produce complex 3D surface structures with nano- . fabrication of arrays of diffractive and refractive opti- .. city, and software and machine independency.
milling machine nano fabri ion